# this file is part of refractiveindex.info database
# refractiveindex.info database is in the public domain
# copyright and related rights waived via CC0 1.0

REFERENCES: |
    D. Franta, D. Nečas, I. Ohlídal. A. Giglia.
    Optical characterization of SiO<sub>2</sub> thin films using universal dispersion model over wide spectral range.
    <a href="https://doi.org/10.1117/12.2227580"><i>Proc. SPIE </i> <b>9890</b>, 989014 (2016)</a>
    (Numerical data kindly provided by Daniel Franta)   
COMMENTS: |
    Film SiO<sub>2</sub>; Deposited by e-beam evaporation on c-Si at 25 °C; 878.4 nm thick film with a fine polycrystalline structure containing water and organic adsorbed contaminants in pores; Heterogenous data processing combining ellipsometric and spectrophotometric measurements; Room temperature.
CONDITIONS:
    film_thickness: 878.4e-9
    substrate: c-Si
    deposition_temperature: 298
DATA:
  - type: tabulated nk
    data: |
        0.0275043 0.9330428184375 0.09468007585343
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